JPH02128944U - - Google Patents

Info

Publication number
JPH02128944U
JPH02128944U JP3751989U JP3751989U JPH02128944U JP H02128944 U JPH02128944 U JP H02128944U JP 3751989 U JP3751989 U JP 3751989U JP 3751989 U JP3751989 U JP 3751989U JP H02128944 U JPH02128944 U JP H02128944U
Authority
JP
Japan
Prior art keywords
probe body
preliminary exhaust
ion source
guide member
pin receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3751989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0727555Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3751989U priority Critical patent/JPH0727555Y2/ja
Publication of JPH02128944U publication Critical patent/JPH02128944U/ja
Application granted granted Critical
Publication of JPH0727555Y2 publication Critical patent/JPH0727555Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP3751989U 1989-03-30 1989-03-30 直接試料導入装置 Expired - Lifetime JPH0727555Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3751989U JPH0727555Y2 (ja) 1989-03-30 1989-03-30 直接試料導入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3751989U JPH0727555Y2 (ja) 1989-03-30 1989-03-30 直接試料導入装置

Publications (2)

Publication Number Publication Date
JPH02128944U true JPH02128944U (en]) 1990-10-24
JPH0727555Y2 JPH0727555Y2 (ja) 1995-06-21

Family

ID=31544704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3751989U Expired - Lifetime JPH0727555Y2 (ja) 1989-03-30 1989-03-30 直接試料導入装置

Country Status (1)

Country Link
JP (1) JPH0727555Y2 (en])

Also Published As

Publication number Publication date
JPH0727555Y2 (ja) 1995-06-21

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